engleski

DEPTH OF GROOVE d MEASUREMENTS BY USE OF INTERFEROMETRICAL METHODS

Within EURAMET Project “ Limitations of measuring methods for the depth of groove“ , a groove depth will be measured by use of different measuring methods i.e. measuring equipment. These measurements will be preformed on roughness standards developed and realized by Laboratory for Precise Measurement of Length (LFSB) at Faculty for Mechanical engineering and Naval architecture, Zagreb. The goal of this Project is to determine measuring possibilities of different measuring methods i.e. equipment for that type of roughness standards. This Paper presents results of measuring the groove depth d by use of interferometrical methods. First, an interferometrical method was applied in the LFSB using the interference microscope Epival-Interphako (method 1) with halogen source of light. This classical microscope has proved its reliability in depth of groove measurements in several former researches and comparisons with other measuring methods such as contact method, polarization method and interferometrical method. The LFSB measurement results are then compared with results obtained on the same roughness standards by Zygo NewWiew 200 interference microscope in National Institute of Standards (NIS), Cairo. These measurements were performed using two different applications: White Light Scanning (method 2) and Step Height (method 3). The aim of these measurements is to determine comparability of used measuring methods by analyze them using statistical methods. Analysis has revealed statistically significant difference of results between methods 1 and 3.

roughness standards; groove depth; interferometric method

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