engleski

GROOVE DEPTH MEASUREMENTS ON LFSB ROUGHNESS REFERENCE STANDARDS

In Laboratory for precise measurements of length LFSB that is now Croatian National Laboratory for length, unique roughness reference standards were developed in the year 1986. Because of world-class quality of those standards and their measuring features, the same were sold in several European countries, and among other, today they are used as roughness reference standards in Italy, Slovenia and Croatia. However, especially in the last decade, there was significant progress in the field of nanotechnology that led to the development of new measuring equipment. Above mentioned standards due to their size, production technology, and measuring features cannot fully ensure metrological requirements in the field on nanometrology i.e. they are not compatible with some newly developed measuring instruments. Therefore, it was decided to search possible limitations in the procedure of groove depth measurements on the LFSB standards. In order to include as many measuring devices i.e. measurement methods in this research, in 2008 LFSB launched EURAMET Project 1012 "Limitations of methods for measuring the depth of the groove" in collaboration with National metrology institutes of Italy and Egypt. In this Paper results of measurements performed within Project are presented, and based on obtained results, advantages and limitations of the LFSB standards have been discussed, with recommendations for their improvement

nanometrology; roughness standards; reproducibility

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