engleski

GISAXS CHARACTERIZATION OF CARBON/TUNGSTEN MULTILAYERS

W/C multilayers are frequently examined as a promising materials for use as X-ray mirrors. Several physical parameters of the multilayer are critical for its optimal performance in that role: regularity of the stack, bilayer period thickness, layer thickness ratio in a bilayer, interface roughness and interface diffusion/ sharpness. In this work we have deposited a series of W/C multilayers by a sequential magnetron sputtering onto various substrates - glass, silica, alumina and mono-Si.

Carbon/tungsten multilayers; GISAXS

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